氩气纯化装置
本装置系采用非蒸散型锆铝16吸气剂及5A分子筛为净化剂。在一定的温度下，吸气剂可与氩气中的微量杂质O2、N2、H2、H2O、CO、CH4等等形成稳定的化合物或固溶体，从而达到对氩气精制之目的。
技术保障措施；
1 组合式纯化工艺，分级处理。
2 净化器采用特殊结构和装料方法，流速设计合理，气流分布均匀。
3 净化炉采用特殊设计的加热构造，加热均匀、稳定。
4 采用优质管件，阀门，避免管道和阀门影响气体质量。
5 采用优质的电器元件和控制仪表，保证温度稳定，减少温度和影响。
6 净化器的活化程序，严格按照活化程序执行，根据现场实际情况适当调整。
7 对用户的操作员进行设备操作培训，了解设备工作原理，掌握设备操作方法，熟悉设备的开车、停车、停电、停水处理方法。
8 对用户设备建立档案，及时提醒用户对设备进行例行检查和维护。是设备处在最佳工作状态。
本装置可与区熔硅单晶炉配套使用，也可用于激光器、溅射、半导体生产、气相色谱仪、特殊灯泡、稀有金属加工等需要用高纯氩气的生产技术领域。
Argon purification unit
The device-based non-evaporable getter 16 aluminum zirconium agents 5A zeolite scavenger. At a certain temperature, the getter with argon trace impurities O2, N2, H2, H2O, CO, CH4, etc. to form a stable compound or solid solution, so as to achieve the purpose of purification of argon.
Technical safeguards;
1 combined purification process, classification treatment.
2 purifier special structure and charging method, reasonable design flow rate, air distribution.
3 Purification heating furnace using a specially designed structure, uniform heating, and stable.
4 high-quality fittings, valves, piping and valves to avoid influence gas quality.
5 high quality electrical components and control instruments, ensure that the temperature is stable, reduce the temperature and impact.
6 purifier activation procedures, in strict accordance with the activation of the program execution, according to the actual circumstances appropriate adjustments.
Seven pairs of operator user equipment operation training, equipment works to understand and master equipment operation methods, familiar with the equipment driving, parking, power, water supply treatment.
8 profile of user equipment, timely to remind the user of the equipment for routine inspection and maintenance. Equipment is in top working condition.
This device can be used with supporting the use of zone melting silicon single crystal furnace can also be used in the technical field production needs with high purity argon lasers, sputtering, semiconductor manufacturing, gas chromatography, special light bulbs, rare metals processing.
